美元指数涨0.68%报102.29
美元指数涨0.68%报102.29华海清科获专利,抛光保持环达到目标形状后自动停止修整
11月6日,华海清科(688120)的发明专利《保持环修整装置、化学机械抛光单元及其控制方法和化学机械抛光设备》获授权,申请号为CN202511705507.1。
在化学机械抛光设备中,保持环的接触面也需要磨削修整。专利把修整盘、形状检测部件和控制器放进同一控制流程,抛光头使保持环与修整盘相对转动,检测部件取得被磨削面的形状。控制器确认形状达到设定条件后停止转动。停机依据是实际检测结果,目的是避免在形状已经合格后继续消耗修整资源。
截至此次授权消息披露时,华海清科今年获得的各类专利授权共99项,比上年同期增加22.22%。在2026年上半年,公司研发投入为2.75亿元,同比增长12.59%。企业知识产权记录中,华海清科股份有限公司名下可查到896条专利信息和39条著作权信息。
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